【 Ulvac Group 】 Measuring instrument components and analyzers

Ulvac Measurement equipment components: Vacuum gauges

We have a lineup lots of our vacuum gauges that can measure any pressure.

  • Atmospheric pressure Pirani Vacuum gauge
    SW1
  • Pirani Vacuum Gauge
    GP-1000G
  • Multi-ion gauge
    SH2
  • Capacitance manometer CCMT-D
  • Ionization vacuum Gauge GI-M2

Ulvac Measurement Equipment components: leak-compactor, gas spectrometer, thickness gauge

This is an introduction of the best-selling leak detector, the measurement of vacuum quality and the Shenge of film deposition.

  • Leak Detector HELIOT900 Series
  • Leak HELIOT ZERO for automatic helium leak test system
  • Basic process gas monitor Qulee BGM
  • Quadrupole mass spectrometer with differential exhaust system kit
    Qulee with YTP
  • Crystal Oscillation Type film Controller CRTM-9100G

Surface analyzers and thin film measuring instruments

Introduction of equipment to measure film thickness and discharge condition of thin film
Process from surface and interface nano scale surface analysis.

  • High-speed spectroscopic ellipsometer UNECS
  • optical process monitor Optix
  • Scanning X-ray electron Spectroscopy Analyzer PHI5000VersaProbeⅡ
  • Time-of-Flight Secondary Ion Mass Spectrometry PHI nanoTOFⅡ
  • Scanning Auger Electron Spectroscopy Analyzer PHI710